智能温度巡测仪毕业设计论文(编辑修改稿)内容摘要:

capacitor, capacitance measured changes in relative humidity can be obtained. This principle is made use of plasma polymerization, polystyrene film temperature sensor, which has the following characteristics: Wide range of measuring humidity。 Wide temperature range, up to 400 ℃ ~ +1500 ℃。 Fast response, less than 1S。 Small size, can be used to test wet small space。 Temperature coefficient. Ceramic capacitive pressure sensor is a nonintermediary fluid pressure sensor dry. Advanced ceramic technology, thick film technology, its technical performance is stable, the annual drift of less than % FS, drift less than 177。 % / 10K, strong antioverload, range up to several hundred times. Measurement range from 0 to 60mpa. E + H Company of Germany and the United States Kavlio products leader. Application of optical fiber sensor material is a major breakthrough, the first for the optical munication technology. Found in optical munication using the temperature, pressure, electric field, magic field and other environmental conditions change, causing fiberoptic transmission of light intensity, phase, frequency, polarization and other changes, the measurement light quantity changes, we can know the cause of these changes in light quantity temperature, pressure, electric field, magic field and other physical size, use of these principles can be developed optical fiber sensors. Compared with traditional sensors optical fiber sensor has many characteristics: high sensitivity, simple structure, small size, corrosion resistance, good electrical insulation, optical flexible, easy to implement remote sensing and so on. Japan is in advanced fiberoptic sensors. If Idec Izumi Corporation and Sunx pany. Optical Fiber and integrated optical technology receptors bine to accelerate the development of fiber optic sensor technology. Integrated optical devices will replace the existing passive optical ponents and optical devices, so that a highbandwidth fiberoptic sensors, signal processing and low voltage, high reliability and low cost. Micromachining technology Semiconductor technology in the processing methods of oxidation, photolithography, diffusion, deposition, surface electronic process, the wizard of corrosion and deposition, sputtering and thin film, which have already been brought to the sensor manufacturing. And so many new sensors, such as the use of semiconductor technology to produce silicon microsensors, using membrane technology to produce fast response gas and humidity sensor using sputtered thin film pressure sensor technology system. Yokogawa Corporation of Japan using the Wizard of corrosion technology for highprecision threedimensional processing, all made of silicon resonant pressure sensor. Core part of the silicon diaphragm by the pressure sensitive silicon diaphragm and above the production of two resonant beam forming, the two resonant beam frequency difference corresponding to different pressures, with the frequency method of measuring the pressure difference, temperature and other factors to eliminate the errors caused . When the ambient temperature changes, the two resonant frequency and amplitude of the same beam, the frequency difference between the two, its the same variation can cancel each other out. The most accurate measurement of up to % FS. . Silicon Microstructure Inc. (SMI) has developed a series of lowcost, linearity of % to % within the silicon micro pressure sensor, the minimum full scale for the (1KP。
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