sentaurus160课程(编辑修改稿)

sentaurus160课程(编辑修改稿)内容摘要：

such as oxidation, deposition and etching. For these steps, a remeshing strategy must be defined. Sentaurus Process uses MGOALS as the remeshing engine. (MGOALS also performs etching and deposition.) MGOALS Meshing Template MGOALS Interface Resolution mgoals accuracy=1e5 resolution= minedge=2e6 = =5e4 • accuracy [μm]: tolerance when updating boundary after etch/depo • resolution [1]:minimum number of levelset cells across • minedge [μm]: target minimum edge length • [1]: layer to layer increase in spacing • [μm]: spacing at the interface MGOALS Meshing Template MGOALS Interface Resolution: Dependencies minedge accuracy Otherwise artifacts are likely! MGOALS Meshing Template  Refinebox  refinebox name=contactimplant min= { 5 0} max= {1 2 0} xrefine= { } yrefine= { } all add Ligament implant  anneal  Time与 temperature设定 Ligament  etch  insert Mask mask name=vtmodify segments= {1 3} photo thickness=2 mask=vtmodify 定义电极  contact name=source point x= y= replace  contact name=drain point x= y= replace  contact name=gate point x= y=0 replace  contact name=substrate bottom 编译和语法纠错 Assignment Sentaurus 课程 第二讲  Adding Parameters  In Sentaurus Workbench, parameters can be defined and multiple values can be assigned to them to create splits in experiments (simulations). Each value of a parameter creates an addition。