fabricationofnanoscaleblmbiosensors

fabricationofnanoscaleblmbiosensors内容摘要：

pectroscopy (EIS) • Fabrication Requirements • Hold a stable membrane – Smooth and clean surface • Preferably oxide surface – Porous surface • Allow for signals to be passed through membrane/proteins • Pore size should be small to increase the stability of suspended region and prevent lipids from forming conformally to the surface Fabrication Requirements • Measure signals with a high S/N ratio – Need a high resistance, low capacitance substrate • Prevents capacitive coupling, capacitive signal leakage • High resistance allows for signals to be measured only through the membrane area – Good electrode placement • . Ag/AgCl electrodes for Cl measurement Porous alumina substrates • Designed by Xinquin Jiang (Spencer group) – Utilizes porous alumina formed Porous Alumina Substrate Fabrication • Use LPCVD (Low Pressure Chemical Vapor Deposition) to coat a 4” DSP (Double sided polish) wafer with Silicon Nitride Si3N4 Si Porous Alumina Substrate Fabrication • Etch a 180 micron x 180 micron square window on the backside of the substrate Porous Alumina Substrate Fabrication • Use KOH as a wet etchant to etch through the Si substrate – KOH preferentially etches 100 crystal plane, resulting in a “Vgroove” Porous Alumina Substrate Fabrication • Evaporate a thin layer of Al onto the front side of the substrate Al P。