传感器新技术的发展外文资料翻译

传感器新技术的发展外文资料翻译内容摘要：

aft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.. The Japanese horizontal river pany uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing。 the system helps the silicon resonance type pressure transmitter. The core partially presses two resonant Liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liang39。 s frequency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity can counterbalance mutually. It’s survey most high accuracy may reach %FS. American Silicon Microstructure Inc.(SMI) the pany develops a series of low ends, linear in % to 65% scope silicon micro pressure transmitter, the lowest full measuring range is (1KPa), it makes take the silicon as the material, has the unique three dimensional structure, the light slight machinefinishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti effect but to lose the bridge balance, the output and the pressure bees the proportion the electrical signal. Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter. The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over e the nonmetallic strain gauge easily the temperature influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shorting and so on slow change, had the precision high, the reliability is high, the volume small characteristic, widely used in domain and so on avia。